@conference{757656,
  author = {Ronald Dixson and Jing Fu and Ndubuisi Orji and William Guthrie and Richard Allen and Michael Cresswell},
  title = {CD-AFM Reference Metrology at NIST and SEMATECH},
  year = {2005},
  number = {5752},
  month = {2005-02-27 00:02:00},
  publisher = {Proceedings of SPIE, San Jose, CA, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32108},
  language = {en},
}