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Casimir force in micro and nano electro mechanical systems

Published

Author(s)

Ricardo Decca, Vladimir Aksyuk, Daniel Lopez

Abstract

The book chapter covers current state of the art and prospects for using micro and nano electro mechanical systems for Casimir force measurement.
Citation
Casimir Physics
Volume
834
Publisher Info
Springer Science+Business Media LLC, New York, NY

Keywords

Casimir force, MEMS NEMS sensors, mechanical sensing, AFM

Citation

Decca, R. , Aksyuk, V. and Lopez, D. (2011), Casimir force in micro and nano electro mechanical systems, Casimir Physics, Springer Science+Business Media LLC, New York, NY, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906575 (Accessed October 5, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created June 30, 2011, Updated October 12, 2021