TY  - CHAP
AU  - Ricardo Decca
AU  - Vladimir Aksyuk
AU  - Daniel Lopez
C2  - Casimir Physics, Springer Science+Business Media LLC, New York, NY
DA  - 2011-07-01 00:07:00
LA  - en
M1  - 834
PB  - Casimir Physics, Springer Science+Business Media LLC, New York, NY
PY  - 2011
TI  - Casimir force in micro and nano electro mechanical systems
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906575
ER  -