@inbook{800226, author = {Ricardo Decca and Vladimir Aksyuk and Daniel Lopez}, title = {Casimir force in micro and nano electro mechanical systems}, year = {2011}, number = {834}, month = {2011-07-01 00:07:00}, publisher = {Casimir Physics, Springer Science+Business Media LLC, New York, NY}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906575}, language = {en}, }