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Carbon Nanotube Tipped Atomic Force Microscopy for Measurement of

Published

Author(s)

G Nagy, M Levy, R Scarmozzino, R M. Osgood, H Dai, R E. Smalley, Chris A. Michaels, G W. Flynn, G F. McLane
Citation
Applied Physics Letters
Volume
73

Citation

Nagy, G. , Levy, M. , Scarmozzino, R. , Osgood, R. , Dai, H. , Smalley, R. , Michaels, C. , Flynn, G. and McLane, G. (1998), Carbon Nanotube Tipped Atomic Force Microscopy for Measurement of <100nm Etch Morphology on Semiconductors, Applied Physics Letters (Accessed May 22, 2024)

Issues

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Created February 16, 1998, Updated October 12, 2021