Nagy, G.
, Levy, M.
, Scarmozzino, R.
, Osgood, R.
, Dai, H.
, Smalley, R.
, Michaels, C.
, Flynn, G.
and McLane, G.
(1998),
Carbon Nanotube Tipped Atomic Force Microscopy for Measurement of <100nm Etch Morphology on Semiconductors, Applied Physics Letters (Accessed May 17, 2026)
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Carbon Nanotube Tipped Atomic Force Microscopy for Measurement of
Published
Author(s)
G Nagy, M Levy, R Scarmozzino, R M. Osgood, H Dai, R E. Smalley, , G W. Flynn, G F. McLane
Citation
Applied Physics Letters
Volume
73
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created February 16, 1998, Updated October 12, 2021