@article{794426,
  author = {G Nagy and M Levy and R Scarmozzino and R Osgood and H Dai and R Smalley and Chris Michaels and G Flynn and G McLane},
  title = {Carbon Nanotube Tipped Atomic Force Microscopy for Measurement of <100nm Etch Morphology on Semiconductors},
  year = {1998},
  number = {73},
  month = {1998-02-17 00:02:00},
  publisher = {Applied Physics Letters},
  language = {en},
}