Cantilever array with optomechanical read-out and integrated actuation for simultaneous high sensitivity force detection
Thomas Michels, Ivo W. Rangelow, Vladimir Aksyuk
We present an on-chip cavity optomechanical cantilever array with integrated actuation, that combines high measurement bandwidth and very low displacement noise floor with compactness, robustness, small size, and potential for low cost batch fabrication inherent in micro- electro- mechanical- systems (MEMS)
July 31-August 4, 2016
International Conference on Optical MEMS and Nanophotonics
, Rangelow, I.
and Aksyuk, V.
Cantilever array with optomechanical read-out and integrated actuation for simultaneous high sensitivity force detection, IEEE Xplore, Singapore, SG, [online], https://doi.org/10.1109/OMN.2016.7565883, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=921085
(Accessed September 29, 2023)