Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Cantilever array with optomechanical read-out and integrated actuation for simultaneous high sensitivity force detection

Published

Author(s)

Thomas Michels, Ivo W. Rangelow, Vladimir Aksyuk

Abstract

We present an on-chip cavity optomechanical cantilever array with integrated actuation, that combines high measurement bandwidth and very low displacement noise floor with compactness, robustness, small size, and potential for low cost batch fabrication inherent in micro- electro- mechanical- systems (MEMS)
Proceedings Title
IEEE Xplore
Conference Dates
July 31-August 4, 2016
Conference Location
Singapore, SG
Conference Title
International Conference on Optical MEMS and Nanophotonics

Keywords

Optomechanics , cantilever arrays, integrated actuation

Citation

Michels, T. , Rangelow, I. and Aksyuk, V. (2016), Cantilever array with optomechanical read-out and integrated actuation for simultaneous high sensitivity force detection, IEEE Xplore, Singapore, SG, [online], https://doi.org/10.1109/OMN.2016.7565883, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=921085 (Accessed June 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created September 14, 2016, Updated April 6, 2022