Michels, T.
, Rangelow, I.
and Aksyuk, V.
(2016),
Cantilever array with optomechanical read-out and integrated actuation for simultaneous high sensitivity force detection, IEEE Xplore, Singapore, SG, [online], https://doi.org/10.1109/OMN.2016.7565883, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=921085
(Accessed October 27, 2025)
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Cantilever array with optomechanical read-out and integrated actuation for simultaneous high sensitivity force detection
Published
Author(s)
, Ivo W. Rangelow,
Abstract
We present an on-chip cavity optomechanical cantilever array with integrated actuation, that combines high measurement bandwidth and very low displacement noise floor with compactness, robustness, small size, and potential for low cost batch fabrication inherent in micro- electro- mechanical- systems (MEMS)Proceedings Title
IEEE Xplore
Conference Dates
July 31-August 4, 2016
Conference Location
Singapore, SG
Conference Title
International Conference on Optical MEMS and Nanophotonics
Pub Type
Conferences
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Keywords
Optomechanics , cantilever arrays, integrated actuation
Citation
Issues
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Created September 14, 2016, Updated April 6, 2022