@conference{871196,
  author = {Thomas Michels and Ivo Rangelow and Vladimir Aksyuk},
  title = {Cantilever array with optomechanical read-out and integrated actuation for simultaneous high sensitivity force detection},
  year = {2016},
  month = {2016-09-14 04:09:00},
  publisher = {IEEE Xplore, Singapore, SG},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=921085},
  doi = {https://doi.org/10.1109/OMN.2016.7565883},
  language = {en},
}