TY - CONF AU - Thomas Michels AU - Ivo Rangelow AU - Vladimir Aksyuk C2 - IEEE Xplore, Singapore, SG DA - 2016-09-14 04:09:00 DO - https://doi.org/10.1109/OMN.2016.7565883 LA - en PB - IEEE Xplore, Singapore, SG PY - 2016 TI - Cantilever array with optomechanical read-out and integrated actuation for simultaneous high sensitivity force detection UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=921085 ER -