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Buried Oxide Defects in Low Dose SIMOX: Processing Conditions, Precipitates and Defects, and Detection Methods

Published

Author(s)

Peter Roitman, S. Bagchee, S. J. Krause, G. A. Garcia, P. J. McMarr, B. J. Mrstik, H. L. Hughes
Proceedings Title
Proc., 1997 Government Microcircuit Applications Conference (GOMAC)
Conference Dates
March 10-13, 1997
Conference Location
Las Vegas, NV, USA

Citation

Roitman, P. , Bagchee, S. , Krause, S. , Garcia, G. , McMarr, P. , Mrstik, B. and Hughes, H. (1997), Buried Oxide Defects in Low Dose SIMOX: Processing Conditions, Precipitates and Defects, and Detection Methods, Proc., 1997 Government Microcircuit Applications Conference (GOMAC), Las Vegas, NV, USA (Accessed June 14, 2024)

Issues

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Created December 30, 1997, Updated October 12, 2021