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PUBLICATIONS

Buried Oxide Defects in Low Dose SIMOX: Processing Conditions, Precipitates and Defects, and Detection Methods

Published

Author(s)

Peter Roitman, S. Bagchee, S. J. Krause, G. A. Garcia, P. J. McMarr, B. J. Mrstik, H. L. Hughes
Proceedings Title
Proc., 1997 Government Microcircuit Applications Conference (GOMAC)
Conference Dates
March 10-13, 1997
Conference Location
Las Vegas, NV, USA
Pub Type
Conferences

Citation

Roitman, P. , Bagchee, S. , Krause, S. , Garcia, G. , McMarr, P. , Mrstik, B. and Hughes, H. (1997), Buried Oxide Defects in Low Dose SIMOX: Processing Conditions, Precipitates and Defects, and Detection Methods, Proc., 1997 Government Microcircuit Applications Conference (GOMAC), Las Vegas, NV, USA (Accessed October 22, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1997, Updated October 12, 2021
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