Roitman, P.
, Bagchee, S.
, Krause, S.
, Garcia, G.
, McMarr, P.
, Mrstik, B.
and Hughes, H.
(1997),
Buried Oxide Defects in Low Dose SIMOX: Processing Conditions, Precipitates and Defects, and Detection Methods, Proc., 1997 Government Microcircuit Applications Conference (GOMAC), Las Vegas, NV, USA
(Accessed October 3, 2024)
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Buried Oxide Defects in Low Dose SIMOX: Processing Conditions, Precipitates and Defects, and Detection Methods
Published
Author(s)
, S. Bagchee, S. J. Krause, G. A. Garcia, P. J. McMarr, B. J. Mrstik, H. L. Hughes
Proceedings Title
Proc., 1997 Government Microcircuit Applications Conference (GOMAC)
Conference Dates
March 10-13, 1997
Conference Location
Las Vegas, NV, USA
Pub Type
Conferences
Citation
Issues
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Created December 30, 1997, Updated October 12, 2021