@conference{763276,
  author = {Peter Roitman and S. Bagchee and S. Krause and G. Garcia and P. McMarr and B. Mrstik and H. Hughes},
  title = {Buried Oxide Defects in Low Dose SIMOX: Processing Conditions, Precipitates and Defects, and Detection Methods},
  year = {1997},
  month = {1997-12-31 00:12:00},
  publisher = {Proc.,  1997 Government Microcircuit Applications Conference (GOMAC), Las Vegas, NV, USA},
  language = {en},
}