TY  - CONF
AU  - Peter Roitman
AU  - S. Bagchee
AU  - S. Krause
AU  - G. Garcia
AU  - P. McMarr
AU  - B. Mrstik
AU  - H. Hughes
C2  - Proc.,  1997 Government Microcircuit Applications Conference (GOMAC), Las Vegas, NV, USA
DA  - 1997-12-31 00:12:00
LA  - en
PB  - Proc.,  1997 Government Microcircuit Applications Conference (GOMAC), Las Vegas, NV, USA
PY  - 1997
TI  - Buried Oxide Defects in Low Dose SIMOX: Processing Conditions, Precipitates and Defects, and Detection Methods
ER  -