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Bidirectional Reflectance Distribution Function of Rough Silicon Wafers
Published
Author(s)
Y J. Shen, Z M. Zhang, Benjamin K. Tsai, D P. DeWitt
Proceedings Title
14th Symp. on Thermophysical Properties
Conference Dates
June 25-30, 2000
Conference Location
Boulder, CO, USA
Conference Title
Proc., 14th Symp. on Thermophysical Properties
Pub Type
Conferences
Citation
Shen, Y.
, Zhang, Z.
, Tsai, B.
and DeWitt, D.
(2000),
Bidirectional Reflectance Distribution Function of Rough Silicon Wafers, 14th Symp. on Thermophysical Properties , Boulder, CO, USA
(Accessed May 30, 2023)