@conference{815681,
  author = {Y Shen and Z Zhang and Benjamin Tsai and D DeWitt},
  title = {Bidirectional Reflectance Distribution Function of Rough Silicon Wafers},
  year = {2000},
  month = {2000-01-01 00:01:00},
  publisher = {14th Symp. on Thermophysical Properties , Boulder, CO, USA},
  language = {en},
}