TY  - CONF
AU  - Shen, Y
AU  - Zhang, Z
AU  - Tsai, Benjamin
AU  - DeWitt, D
C2  - 14th Symp. on Thermophysical Properties , Boulder, CO, USA
DA  - 2000-01-01 00:01:00
LA  - en
PB  - 14th Symp. on Thermophysical Properties , Boulder, CO, USA
PY  - 2000
TI  - Bidirectional Reflectance Distribution Function of Rough Silicon Wafers
ER  -