TY - CONF AU - Y Shen AU - Z Zhang AU - Benjamin Tsai AU - D DeWitt C2 - 14th Symp. on Thermophysical Properties , Boulder, CO, USA DA - 2000-01-01 00:01:00 LA - en PB - 14th Symp. on Thermophysical Properties , Boulder, CO, USA PY - 2000 TI - Bidirectional Reflectance Distribution Function of Rough Silicon Wafers ER -