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PUBLICATIONS

Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas

Published

Author(s)

S. B. Radovanov, James K. Olthoff, Richard J. Van Brunt
Proceedings Title
Proc. of the XX Intl. Conf. on Phenomena in Ionized Gases
Conference Dates
July 8-12, 1991
Conference Location
Barga, 1, IT
Pub Type
Conferences

Download Paper

Local Download
Electronics and Advanced communications

Citation

Radovanov, S. , Olthoff, J. and Van Brunt, R. (1991), Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas, Proc. of the XX Intl. Conf. on Phenomena in Ionized Gases, Barga, 1, IT, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26841 (Accessed April 19, 2024)

Created June 30, 1991, Updated October 12, 2021