TY  - CONF
AU  - S. Radovanov
AU  - James Olthoff
AU  - Richard Van Brunt
C2  - Proc. of the XX Intl. Conf. on Phenomena in Ionized Gases, Barga, 1, IT
DA  - 1991-07-01 00:07:00
LA  - en
PB  - Proc. of the XX Intl. Conf. on Phenomena in Ionized Gases, Barga, 1, IT
PY  - 1991
TI  - Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26841
ER  -