McClelland, J.
(1998),
Atoms join in the race for lithography in the next century, Physics World
(Accessed April 21, 2025)
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Atoms join in the race for lithography in the next century
Published
Author(s)
Abstract
A news story is presented describing recent experiments on lithography using laser-controlled metastable rare gas atoms.Citation
Physics World
Volume
11
Issue
8
Pub Type
Journals
Keywords
atom lithography, contamination lithography, laser manipulation of atoms, metastable argon, metastable atoms, sub-100 nm lithography
Citation
Issues
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Created January 1, 1998, Updated February 19, 2017