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Atoms join in the race for lithography in the next century

Published

Author(s)

Jabez J. McClelland

Abstract

A news story is presented describing recent experiments on lithography using laser-controlled metastable rare gas atoms.
Citation
Physics World
Volume
11
Issue
8

Keywords

atom lithography, contamination lithography, laser manipulation of atoms, metastable argon, metastable atoms, sub-100 nm lithography

Citation

McClelland, J. (1998), Atoms join in the race for lithography in the next century, Physics World (Accessed April 18, 2024)
Created January 1, 1998, Updated February 19, 2017