TY  - JOUR
AU  - McClelland, Jabez
C2  - Physics World
DA  - 1998-01-01 00:01:00
LA  - en
M1  - 11
PB  - Physics World
PY  - 1998
TI  - Atoms join in the race for lithography in the next century
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620495
ER  -