@article{1334806, author = {Jabez McClelland}, title = {Atoms join in the race for lithography in the next century}, year = {1998}, number = {11}, month = {1998-01-01 00:01:00}, publisher = {Physics World}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620495}, language = {en}, }