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PUBLICATIONS

Atomic Layer Deposition - Process Models and Metrologies

Published

Author(s)

D R. Burgess, J. E. Maslar, W S. Hurst, E F. Moore, W A. Kimes, R R. Fink, Nhan Van Nguyen
Proceedings Title
Characterization and Metrology for ULSI Technology: 2005
Conference Dates
March 15-18, 2005
Conference Location
Richardson, TX, USA
Conference Title
2005 International Conference on Characterization and Metrology for ULSI Technology
Pub Type
Conferences

Citation

Burgess, D. , Maslar, J. , Hurst, W. , Moore, E. , Kimes, W. , Fink, R. and Nguyen, N. (2005), Atomic Layer Deposition - Process Models and Metrologies, Characterization and Metrology for ULSI Technology: 2005, Richardson, TX, USA (Accessed March 13, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created September 29, 2005, Updated October 12, 2021