TY  - CONF
AU  - D Burgess
AU  - J. Maslar
AU  - W Hurst
AU  - E Moore
AU  - W Kimes
AU  - R Fink
AU  - Nhan Nguyen
C2  - Characterization and Metrology for ULSI Technology: 2005, Richardson, TX, USA
DA  - 2005-09-30 00:09:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology: 2005, Richardson, TX, USA
PY  - 2005
TI  - Atomic Layer Deposition - Process Models and Metrologies
ER  -