@conference{759221,
  author = {D Burgess and J. Maslar and W Hurst and E Moore and W Kimes and R Fink and Nhan Nguyen},
  title = {Atomic Layer Deposition - Process Models and Metrologies},
  year = {2005},
  month = {2005-09-30 00:09:00},
  publisher = {Characterization and Metrology for ULSI Technology: 2005, Richardson, TX, USA},
  language = {en},
}