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Argon ion beam alters grain structure of copper in surface preparation for EBSD



Roy H. Geiss, David T. Read


In preparing specimens of thin films of copper for examination by electron backscatter diffraction (EBSD), surface preparation is often necessary to produce acceptable EBSD patterns. Typically, removal of a rough, damaged or oxidized layer of the surface is required. Controlled erosion of the surface using an argon ion beam is a common technique. On applying recommended etching conditions to rough surfaces of pure copper films, we observed that the grain structure appeared to change. To further investigate this, we performed a series of controlled experiments on both thin plated films and on bulk copper. We chose as a starting structure samples that were prepared using electrochemical polishing. Secondary electron (SE) images and orientation maps deduced from EBSD data were used to evaluate the grain structures. The orientation maps used were inverse pole figures (IPF) constructed in the plane normal direction (ND) and also in an in-plane orthogonal direction (RD).
Proceedings Title
Microscopy and Microanalysis 2010 Proceedings
Conference Dates
August 1-5, 2010
Conference Location
Portland, OR
Conference Title
Microscopy and Microanalysis 2010


Argon, copper, EBSD, electroplated, grain size, ion beam


Geiss, R. and Read, D. (2010), Argon ion beam alters grain structure of copper in surface preparation for EBSD, Microscopy and Microanalysis 2010 Proceedings, Portland, OR, [online], (Accessed June 16, 2024)


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Created August 1, 2010, Updated November 10, 2018