Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

An approach to accurate x-ray mask measurements in a scanning electron microscope:

Published

Author(s)

Michael T Postek, Robert D Larrabee, William J Keery
Citation
- NIST IR 89-4047
Report Number
NIST IR 89-4047

Citation

Postek, M. , Larrabee, R. and Keery, W. (1989), An approach to accurate x-ray mask measurements in a scanning electron microscope:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.89-4047 (Accessed June 13, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1989, Updated May 20, 2023