TY  - GEN
AU  - Postek, Michael T
AU  - Larrabee, Robert D
AU  - Keery, William J
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1989-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.89-4047
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1989
TI  - An approach to accurate x-ray mask measurements in a scanning electron microscope:
ER  -