@misc{1199266,
  author = {Michael T Postek and Robert D Larrabee and William J Keery},
  title = {An approach to accurate x-ray mask measurements in a scanning electron microscope:},
  year = {1989},
  month = {1989-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.89-4047},
  language = {en},
}