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The Application of Transmission Electron Detection to X-ray Mask Calibrations and Inspection

Published

Author(s)

Michael T. Postek, Robert D. Larrabee, William J. Keery, E Marx
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control V
Volume
1464
Conference Dates
March 4-5, 1991
Conference Location
San Jose, CA, USA

Citation

Postek, M. , Larrabee, R. , Keery, W. and Marx, E. (1991), The Application of Transmission Electron Detection to X-ray Mask Calibrations and Inspection, Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control V, San Jose, CA, USA (Accessed December 15, 2024)

Issues

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Created December 30, 1991, Updated October 12, 2021