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The Application of Transmission Electron Detection to X-ray Mask Calibrations and Inspection

Published

Author(s)

Michael T. Postek, Robert D. Larrabee, William J. Keery, E Marx
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control V
Volume
1464
Conference Dates
March 4-5, 1991
Conference Location
San Jose, CA, USA

Citation

Postek, M. , Larrabee, R. , Keery, W. and Marx, E. (1991), The Application of Transmission Electron Detection to X-ray Mask Calibrations and Inspection, Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control V, San Jose, CA, USA (Accessed April 17, 2024)
Created December 30, 1991, Updated October 12, 2021