@conference{766006, author = {Michael Postek and Robert Larrabee and William Keery and E Marx}, title = {The Application of Transmission Electron Detection to X-ray Mask Calibrations and Inspection}, year = {1991}, number = {1464}, month = {1991-12-31 00:12:00}, publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control V, San Jose, CA, USA}, language = {en}, }