TY  - CONF
AU  - Michael Postek
AU  - Robert Larrabee
AU  - William Keery
AU  - E Marx
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control V, San Jose, CA, USA
DA  - 1991-12-31 00:12:00
LA  - en
M1  - 1464
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control V, San Jose, CA, USA
PY  - 1991
TI  - The Application of Transmission Electron Detection to X-ray Mask Calibrations and Inspection
ER  -