Application of CW-CRDS to Monitor and Control Chemical Vapor Deposition
David S. Green, J P. Looney, G W. Rubloff
Continuous wave excitation cavity ring-down spectroscopy (CW-CRDS) is being evaluated for real time chemical sensing of volatile CVD byproducts (e.g. HF, H2O) and as a quantitative and robust metrology tool for advanced process control methodologies.
, Looney, J.
and Rubloff, G.
Application of CW-CRDS to Monitor and Control Chemical Vapor Deposition, 2000 IEEE/LEOS Summer Topical Meeting : Optical Sensing in Semiconductor Manufacturing, Aventura, FL
(Accessed December 7, 2023)