@conference{81536,
  author = {David Green and J Looney and G Rubloff},
  title = {Application of CW-CRDS to Monitor and Control Chemical Vapor Deposition},
  year = {2000},
  month = {2000-07-01},
  publisher = {2000 IEEE/LEOS Summer Topical Meeting : Optical Sensing in Semiconductor Manufacturing, Aventura, FL},
  language = {en},
}