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Analytic analysis of ellipsometric errors:



Deane Chandler-Horowitz
- NBS SP 400-78
Report Number
NBS SP 400-78


Chandler-Horowitz, D. (1986), Analytic analysis of ellipsometric errors:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], (Accessed June 10, 2023)
Created January 1, 1986, Updated May 19, 2023