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Analytic analysis of ellipsometric errors:

Published

Author(s)

Deane Chandler-Horowitz
Citation
- NBS SP 400-78
Report Number
NBS SP 400-78

Citation

Chandler-Horowitz, D. (1986), Analytic analysis of ellipsometric errors:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-78 (Accessed November 5, 2024)

Issues

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Created January 1, 1986, Updated May 19, 2023