Chandler-Horowitz, D.
(1986),
Analytic analysis of ellipsometric errors:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-78
(Accessed June 10, 2023)
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Analytic analysis of ellipsometric errors:
Published
Author(s)
Citation
- NBS SP 400-78
Report Number
NBS SP 400-78
Pub Type
NIST Pubs
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Citation
Created January 1, 1986, Updated May 19, 2023