@misc{1161631,
  author = {Deane Chandler-Horowitz},
  title = {Analytic analysis of ellipsometric errors:},
  year = {1986},
  month = {1986-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-78},
  language = {en},
}