TY - GEN AU - Deane Chandler-Horowitz C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1986-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.SP.400-78 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1986 TI - Analytic analysis of ellipsometric errors: ER -