Accurate Electrical Measurement of Coupled Lines on Lossy Silicon
Uwe Arz, Dylan F. Williams, Dave K. Walker, Hartmut Grabinski
In this paper we apply a measurement method designed for asymmetric coupled lines to determine the broadband propagation characteristics of symmetric coupled lines fabricated on a highly conductive silicon substrate. We show that the matrices of frequency-dependent propagation constants and characteristic impedances, as extracted from calibrated four-port S-parameter measurements, agree very well with data predicted by numerical calculations.
, Williams, D.
, Walker, D.
and Grabinski, H.
Accurate Electrical Measurement of Coupled Lines on Lossy Silicon, 9th Elect. Perf. Elect. Pkg. Conf., Scottsdale, AZ, [online], https://doi.org/10.1109/EPEP.2000.895523
(Accessed December 2, 2023)