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Accurate Electrical Measurement of Coupled Lines on Lossy Silicon



Uwe Arz, Dylan F. Williams, Dave K. Walker, Hartmut Grabinski


In this paper we apply a measurement method designed for asymmetric coupled lines to determine the broadband propagation characteristics of symmetric coupled lines fabricated on a highly conductive silicon substrate. We show that the matrices of frequency-dependent propagation constants and characteristic impedances, as extracted from calibrated four-port S-parameter measurements, agree very well with data predicted by numerical calculations.
Conference Dates
October 23-25, 2000
Conference Location
Scottsdale, AZ
Conference Title
9th Elect. Perf. Elect. Pkg. Conf.


characteristic impedance, coupling, measurement, silicon, substrate effect, transmission line


Arz, U. , Williams, D. , Walker, D. and Grabinski, H. (2000), Accurate Electrical Measurement of Coupled Lines on Lossy Silicon, 9th Elect. Perf. Elect. Pkg. Conf., Scottsdale, AZ, [online], (Accessed June 19, 2024)


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Created October 1, 2000, Updated January 27, 2020