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Accurate Characteristic Impedance Measurement on Silicon



Dylan F. Williams, Uwe Arz, Hartmut Grabinski


This paper presents a new method that accurately determines the characteristic impedance of planar transmission lines printed on lossy dielectrics even when contact-pad capacitance and conductance are large. We demonstrate the method on a coplanar waveguide fabricated on fused silica and a microstrip line fabricated on a highly conductive silicon substrate.
Proceedings Title
Tech. Dig., IEEE MTT-S International Microwave Symposium
Conference Dates
June 7-12, 1998
Conference Location
Baltimore, MD


Williams, D. , Arz, U. and Grabinski, H. (1998), Accurate Characteristic Impedance Measurement on Silicon, Tech. Dig., IEEE MTT-S International Microwave Symposium, Baltimore, MD, [online], (Accessed May 19, 2024)


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Created June 1, 1998, Updated November 10, 2018