Accurate Characteristic Impedance Measurement on Silicon
Dylan F. Williams, Uwe Arz, Hartmut Grabinski
This paper presents a new method that accurately determines the characteristic impedance of planar transmission lines printed on lossy dielectrics even when contact-pad capacitance and conductance are large. We demonstrate the method on a coplanar waveguide fabricated on fused silica and a microstrip line fabricated on a highly conductive silicon substrate.
Tech. Dig., IEEE MTT-S International Microwave Symposium
, Arz, U.
and Grabinski, H.
Accurate Characteristic Impedance Measurement on Silicon, Tech. Dig., IEEE MTT-S International Microwave Symposium, Baltimore, MD, [online], https://doi.org/10.1109/MWSYM.1998.700955
(Accessed September 28, 2021)