Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Accurate Characteristic Impedance Measurement on Silicon

Published

Author(s)

Dylan F. Williams, Uwe Arz, Hartmut Grabinski

Abstract

This paper presents a new method that accurately determines the characteristic impedance of planar transmission lines printed on lossy dielectrics even when contact-pad capacitance and conductance are large. We demonstrate the method on a coplanar waveguide fabricated on fused silica and a microstrip line fabricated on a highly conductive silicon substrate.
Proceedings Title
Tech. Dig., IEEE MTT-S International Microwave Symposium
Volume
3
Conference Dates
June 7-12, 1998
Conference Location
Baltimore, MD

Citation

Williams, D. , Arz, U. and Grabinski, H. (1998), Accurate Characteristic Impedance Measurement on Silicon, Tech. Dig., IEEE MTT-S International Microwave Symposium, Baltimore, MD, [online], https://doi.org/10.1109/MWSYM.1998.700955 (Accessed September 28, 2021)
Created June 1, 1998, Updated November 10, 2018