NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

3D-AFM Measurements for Semiconductor Structures and Devices

Published

Author(s)

Ndubuisi G. Orji, Ronald G. Dixson
Citation
Metrology and Diagnostic Techniques for Nanoelectronics, (Eds.) Ma and Seiler
Publisher Info
Pan Stanford Publishing, Boca Raton, 33487, FL
Pub Type
Book Chapters

Download Paper

Local Download

Keywords

3D-AFM, Critical Dimension AFM, Semiconductor Structures, Metrology, Linewidth
Manufacturing and Nanometrology

Citation

Orji, N. and Dixson, R. (2017), 3D-AFM Measurements for Semiconductor Structures and Devices, Metrology and Diagnostic Techniques for Nanoelectronics, (Eds.) Ma and Seiler, Pan Stanford Publishing, Boca Raton, 33487, FL, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918090 (Accessed October 13, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created March 27, 2017, Updated June 12, 2019
Was this page helpful?