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3D-AFM Measurements for Semiconductor Structures and Devices

Published

Author(s)

Ndubuisi G. Orji, Ronald G. Dixson
Citation
Metrology and Diagnostic Techniques for Nanoelectronics, (Eds.) Ma and Seiler
Publisher Info
Pan Stanford Publishing, Boca Raton, 33487, FL

Keywords

3D-AFM, Critical Dimension AFM, Semiconductor Structures, Metrology, Linewidth

Citation

Orji, N. and Dixson, R. (2017), 3D-AFM Measurements for Semiconductor Structures and Devices, Metrology and Diagnostic Techniques for Nanoelectronics, (Eds.) Ma and Seiler, Pan Stanford Publishing, Boca Raton, 33487, FL, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918090 (Accessed July 18, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created March 27, 2017, Updated June 12, 2019