Orji, N.
and Dixson, R.
(2017),
3D-AFM Measurements for Semiconductor Structures and Devices, Metrology and Diagnostic Techniques for Nanoelectronics, (Eds.) Ma and Seiler, Pan Stanford Publishing, Boca Raton, 33487, FL, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918090
(Accessed February 7, 2025)