TY  - CHAP
AU  - Ndubuisi Orji
AU  - Ronald Dixson
C2  - Metrology and Diagnostic Techniques for Nanoelectronics, (Eds.) Ma and Seiler, Pan Stanford Publishing, Boca Raton,  33487, FL
DA  - 2017-03-27
LA  - en
PB  - Metrology and Diagnostic Techniques for Nanoelectronics, (Eds.) Ma and Seiler, Pan Stanford Publishing, Boca Raton,  33487, FL
PY  - 2017
TI  - 3D-AFM Measurements for Semiconductor Structures and Devices
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918090
ER  -