@inbook{222601,
  author = {Ndubuisi Orji and Ronald Dixson},
  title = {3D-AFM Measurements for Semiconductor Structures and Devices},
  year = {2017},
  month = {2017-03-27},
  publisher = {Metrology and Diagnostic Techniques for Nanoelectronics, (Eds.) Ma and Seiler, Pan Stanford Publishing, Boca Raton,  33487, FL},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918090},
  language = {en},
}