Silver, R.
(2000),
1998-99 NIST/International SEMATECH Collaboration to Develop Atom-Based Linewidth Standards, SEMATECH Tech Transfer Document; NIST/SEMATECH Proprietary
(Accessed December 13, 2024)
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1998-99 NIST/International SEMATECH Collaboration to Develop Atom-Based Linewidth Standards
Published
Author(s)
Abstract
This is the final report for the SEMATECH funded SEMATECH/NIST contract for the development of atom-based standard artifacts. This report is intended to summarize the progress completed on the technical elements and is intended as a general release document. This project, which is a portion of a larger NIST effort, was aimed at the development of three-dimensional structures of controlled geometry whose dimensions can be measured and traced directly to the intrinsic crystal lattice. These samples are intended to be dimensionally stable to allow transfer to other measurement tools which can measure the artifacts with dimensions known on the nanometer scale.Citation
SEMATECH Tech Transfer Document; NIST/SEMATECH Proprietary
Pub Type
Others
Keywords
atom-based, crystal, metrology, standards
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2000, Updated February 19, 2017