@misc{190571,
  author = {Richard Silver},
  title = {1998-99 NIST/International SEMATECH Collaboration to Develop Atom-Based Linewidth Standards},
  year = {2000},
  month = {2000-01-01},
  publisher = {SEMATECH Tech Transfer Document; NIST/SEMATECH Proprietary},
  language = {en},
}