TY  - VIDEO
AU  - Richard Silver
C2  - SEMATECH Tech Transfer Document; NIST/SEMATECH Proprietary
DA  - 2000-01-01
LA  - en
PB  - SEMATECH Tech Transfer Document; NIST/SEMATECH Proprietary
PY  - 2000
TI  - 1998-99 NIST/International SEMATECH Collaboration to Develop Atom-Based Linewidth Standards
ER  -