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High vacuum (10-1 to 10-4 Pa) standards are maintained by many of the world s National Metrology Institutes (NMI). For purposes of trade equity as well as
James A. Fedchak, Patrick J. Abbott, Jay H. Hendricks, Paul C. Arnold, Neil T. Peacock
This document represents a recommended practice for the calibration of ionization gauges using the comparison method. In this method, ionization gauges are