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Heather Patrick

My research interests focus on applications of scattering and reflectance measurements, advanced light sources, and robotics to the characterization and metrology of optical materials.  I am the project lead on ROSI (the Robotic Optical Scatter Instrument), a new NIST facility for ultraviolet to shortwave infrared spectral- and angle-resolved reflectance and scattering measurements.

Research projects:

ROSI

Optical scattering from surfaces

Bidirectional optical scattering facility

Optical grating scatterometry

Focused beam spectroscopic ellipsometry

Publications

Created October 9, 2019