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Eric C. Benck (Fed)


Index of refraction of germanium

John H. Burnett, Eric C. Benck, Simon G. Kaplan, Erik Stover, Adam Phenis
Measurements of the index of refraction of a sample of high-quality, single-crystal germanium using the minimum deviation refractometry method are presented for

Plasma Diagnostic Techniques

Eric C. Benck
In order for extreme ultraviolet (EUV) plasma sources to become the next generation lithographic source, significant obstacles still need to be overcome
Created October 9, 2019, Updated December 8, 2022