Eric C. Benck

Publications

Time-Resolved Measurements of the E-to-H Mode Transition in Electronegative Pulse-Modulated Inductively Coupled Plasmas

October 12, 2021

Author(s)

M Edamura, Eric C. Benck, Yicheng Wang

Time-resolved measurements of electronegative pulse-modulated inductively coupled plasmas (ICPs) were carried out using various measurement techniques. It was

The Role of Fluorine Chemistry in Anisotropic Etching of Dielectric Materials

October 12, 2021

Author(s)

B Ji, S A. Motika, P R. Badowski, S Dheandhanoo, C Timmons, D E. Hess, Eric C. Benck, Y Ye

Fluorine-containing compounds have for many years been utilized to etch dielectric materials such as silicon oxide. Maintaining the balance between the removal

Index of refraction of germanium

April 27, 2020

Author(s)

John H. Burnett, Eric C. Benck, Simon G. Kaplan, Erik Stover, Adam Phenis

Measurements of the index of refraction of a sample of high-quality, single-crystal germanium using the minimum deviation refractometry method are presented for

Progress on Vacuum-to-Air Mass Calibration System Using Magnetic Suspension to Disseminate the Planck-constant Realized Kilogram

July 31, 2017

Author(s)

Eric C. Benck, Corey A. Stambaugh, Edward C. Mulhern, Patrick J. Abbott, Zeina J. Kubarych

The kilogram is the unit of mass in the International System of units (SI) and has been defined as the mass of the International Prototype Kilogram (IPK) since

Plasma Diagnostic Techniques

February 19, 2017

Author(s)

Eric C. Benck

In order for extreme ultraviolet (EUV) plasma sources to become the next generation lithographic source, significant obstacles still need to be overcome

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Eric C. Benck (Fed)

Publications