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Daniel Sunday (Fed)

Research Interests

  • Soft x-ray scattering and reflectivity for structure and orientation in thin films
  • Block copolymer directed self-assembly and lithography
  • Block copolymers with alternative architectures
  • Photoresist chemistry and processing
  • Properties of polymers under confinement and in thin films

 

Directed Self-Assembly

Awards

NRC Postdoctoral Fellowship, 2011

Department of Commerce Bronze Medal, 2016

Department of Commerce Gold Medal, 2018

Selected Publications

Publications

Lab-based multi-wavelength EUV diffractometry for critical dimension metrology

Author(s)
Bryan Barnes, Aaron Chew, Nicholas Jenkins, Yunzhe Shao, Martin Sohn, Regis Kline, Daniel Sunday, Purnima Balakrishnan, Thomas Germer, Steven Grantham, Clay Klein, Stephanie Moffitt, Eric Shirley, Henry Kapteyn, MARGARET MURNANE
Background: The industry is developing extreme-ultraviolet wavelength (EUV) techniques to measure critical dimensions (CDs) in logic fabrication. As nascent

Data and Software Publications

CyRSoXS: A GPU-accelerated virtual instrument for Polarized Resonant Soft X-ray Scattering (P-RSoXS)

Author(s)
Kumar Saurabh, Peter J. Dudenas, Eliot Gann, Veronica Reynolds, Subhrangsu Mukherjee, Daniel Sunday, Tyler Martin, Peter Beaucage, Michael Chabinyc, Dean M. DeLongchamp, Adarsh Krishnamurthy, Baskar Ganapathysubramanian
Polarized Resonant Soft X-ray scattering (P-RSoXS) has emerged as a powerful synchrotron-based tool to measure structure in complex, chemically heterogeneous systems. P-RSoXS combines principles of X

Patents (2018-Present)

Created October 9, 2019, Updated May 28, 2024
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