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Christopher Ray (Assoc)

Publications

The Nanolithography Toolbox

Author(s)
Krishna Coimbatore Balram, Daron Westly, Marcelo I. Davanco, Karen E. Grutter, Qing Li, Thomas Michels, Christopher H. Ray, Richard Kasica, Christopher B. Wallin, Ian J. Gilbert, Brian A. Bryce, Gregory Simelgor, Juraj Topolancik, Nicolae Lobontiu, Yuxiang Liu, Pavel Neuzil, Vojtech Svatos, Kristen A. Dill, Neal A. Bertrand, Meredith Metzler, Gerald Lopez, David Czaplewski, Leonidas Ocola, Kartik Srinivasan, Samuel Stavis, Vladimir Aksyuk, James Alexander Liddle, Slava Krylov, Robert Ilic
This article describes a platform-independent software package for scripted lithography pattern layout generation and complex processing. The Nanolithography
Created July 30, 2019, Updated January 29, 2025