Patents

Patents listed here reflect only technologies patented from FY 2018-present. To view all of NIST's patented technologies, visit the NIST pages on the Federal Laboratory Consortium website.

Displaying 1 - 7 of 7

Curved Metallic Grating And Process For Making Same

NIST Inventors

Daniel Josell and Thomas P. Moffat

Making a curved metallic grating for matching angular divergence of incident radiation includes: providing a mandrel with a curved receiving surface; disposing a planar substrate on the curved receiving surface; applying a clamping force to the planar substrate at the planar field surface; bending

Process for Making a Metallic Grating

NIST Inventors

Daniel Josell and Thomas P. Moffat

A metallic grating is formed to include a substrate; a plurality of high aspect ratio trenches disposed in the substrate such that the high aspect ratio trenches are spaced apart from one another by a field surface of the substrate; a metallic superconformal filling formed and disposed in the high

Process For Hysteretic Current -Voltage Mediated Void-Free Superconformal And Bottom-Up Filling

NIST Inventors

Thomas P. Moffat and Daniel Josell

Hysteretic current-voltage mediated void-free superconformal and bottom-up filling of recessed features includes providing an electrodeposition composition with a hysteretic cyclic voltammogram; providing the substrate controlling applied electric potential; autonomously reducing the deposition

Metallic Grating

NIST Inventors

Daniel Josell and Thomas P. Moffat

A metallic grating includes a substrate; a plurality of high aspect ratio trenches disposed in the substrate such that the high aspect ratio trenches are spaced apart from one another by a field surface of the substrate; a metallic superconformal filling formed and disposed in the high aspect ratio

Bottom-up Gold Electrodeposition for High Aspect Ratio Features in Imaging Applications

NIST Inventors

Daniel Josell and Thomas P. Moffat

A process for filling trenches with gold from the bottom, permitting seam-free and void-free filling. Leaves minimal undesired deposits, little waste, and a reduction in post-deposition processing time.

Superconformal Filling Composition and Superconformally Filling a Recessed Feature of an Article

NIST Inventors

Daniel Josell

Superconformally filling a recessed feature includes: contacting the recessed feature with superconformal filling composition that includes: Au(SO 3) 2 3− anions; SO 3 2− anions; and Bi 3+ cations; convectively transporting Au(SO 3) 2 3− and Bi 3+ to the bottom member of the recessed feature

Process for Forming a Transition Zone Terminated Superconformal Filling

NIST Inventors

Daniel Josell and Thomas P. Moffat

Forming a transition zone terminated superconformal filling in a recess includes: providing an electrodeposition composition including: a metal electrolyte including a plurality of metal ions, solvent, and suppressor; providing the article including: a field surface and the recess that includes a

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