Guillaume, N.
, Kiihamaki, J.
, Karttunen, J.
and Kattelus, H.
(2001),
Use of Electrical Test Structures to Characterize Trench Profiles Etched on SOI Wafers, Proc. IEEE 2001 Int. Conference on Microelectronic Test Structures, Kobe, 1, JA
(Accessed November 4, 2025)
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Use of Electrical Test Structures to Characterize Trench Profiles Etched on SOI Wafers
Published
Author(s)
, J. Kiihamaki, J. Karttunen, H. Kattelus
Proceedings Title
Proc. IEEE 2001 Int. Conference on Microelectronic Test Structures
Conference Dates
March 19-22, 2001
Conference Location
Kobe, 1, JA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created February 28, 2001, Updated October 12, 2021